COMPARISON OF PERFORMANCE PIEZO RESONATORS BAW-TYPE TO CREATE CHEMICAL SENSOR

Abstract

Summary. Currently creation of small inexpensive analytical devices is very actual. Possibility of miniaturization vibrational gas sensors is associated with the possibility of using resonators smaller than the traditionally used sizes. The study used two types of sensors: sensors based on BAW resonators brand RK 169 with frequency of self-oscillation of 10 MHz and a mini - sensors, resonators based on BAW resonators brand MBC 10000 and MBC 15000 with frequencies of self-oscillation of 10 and 15 MHz respectively. As modifier of electrodes polyethylene glycol PEG 2000 was used. Check of sensitivity of microbalance and evaluation other performance properties of sensors was carried in pairs chloroform, 2-propanol and benzene. Mini -sensor has a smaller surface available sorption, whereby mini-sesors have a smaller analytical signal as compared traditional used resonators. Mass of coating which cause failure of self-oscillation for mini -sensors does not exceed 3 mcg and it is much smaller than for traditionally used sensors. It has been established that the analytical signal of mini-sensors in pairs of test compounds is higher than analytical signal of traditionally used sensors. Analytical signal is more for sensors with higher mass of coating and for sensors with higher self￾oscillation frequency. The study found that the mini-sensors can be used for a narrow range of problems in the analysis. the sensitivity of mini-sensors is higher than that traditionally used sensors, but they have significant limitations on weight of coating.